Merit Sensor Systems, Inc.

Date: February 21, 2013

Media Contact:
Senior Marketing Communications Manager
Michelle Stevens
[email protected]
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Rudolph's NSX Macro Defect Inspection System Selected by Merit Sensor Systems

The automated inspection system will assure quality of pressure sensors used in critical applications.


Flanders, New Jersey (April 10, 2013) Rudolph Technologies, Inc. (NASDAQ: RTEC), a leading provider of process characterization equipment and software for the semiconductor and related industries, announced today that it has sold an NSX® Series macro defect inspection system to Merit Sensor Systems, Inc., a wholly-owned subsidiary of Merit Medical Systems, Inc. (NASDAQ: MMSI), a leading manufacturer and marketer of proprietary disposable devices used primarily in cardiology, radiology and endoscopy. Merit Sensor will use the tool to inspect its pressure sensors that are used in a wide variety of applications including medical devices such as a balloon inflation device, which expands balloon catheters during angioplasty procedures.

"Quality assurance is an absolute requirement in these products because they are used in such critical applications," said Scott Sidwell, engineering manager, Merit Sensor Systems. "The NSX automated inspection system allows us to inspect 100 percent of the sensors with high confidence that we will detect any and all significant defects. We expect this new inspection tool to provide substantial improvements in speed, reliability and repeatability over the inspection system it is replacing. We have been particularly pleased by Rudolph's willingness and ability to respond to our technical requirements during the competitive evaluation that led to our selection of the NSX system."

Angioplasty is a minimally invasive surgical procedure used to widen arteries that have been narrowed by the accumulation of plaque. A collapsed balloon on a catheter is inserted into the narrowed section of the artery and carefully inflated to pressures 75 to 500-times normal blood pressure, mechanically expanding the plaque and surrounding arterial muscle layers. The balloon is then deflated and removed. A stent may or may not be inserted to help maintain the expanded luminal passage. Precise monitoring of the pressure in the balloon is critical to the success of the procedure. The pressure sensors are manufactured in batches on silicon wafer substrates, and subsequently sawed into individual sensors. The NSX can inspect wafers at any stage of the fabrication process, both before and after sawing; 100 percent inspection is commonly required in critical applications such as medical devices and automotive systems.

The field-proven NSX Series, preferred by manufacturers for automotive, medical and related applications where 100 percent inspection is normally required, can deliver fast, repeatable macro defect inspection throughout the device manufacturing process. Macro defects (defects 0.5 micron and larger) can be created during wafer manufacturing, probing, bumping, dicing, or by general handling, and can have a major impact on the quality of a microelectronic device. The NSX quickly and accurately detects yield-inhibiting defects, providing quality assurance and valuable process information.

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About Merit Sensor Systems, Inc.

Merit Sensor Systems, Inc. ( has partnered with customers for more than 20 years to design, fabricate, assemble and package reliable, cost-effective piezoresistive pressure sensor solutions for automotive, medical, industrial, aviation, defense and consumer applications. Merit Sensor Systems is located in Salt Lake City, Utah and is a subsidiary of Merit Medical Systems, Inc.


About Rudolph Technologies

Rudolph Technologies, Inc. is a worldwide leader in the design, development, manufacture and support of defect inspection, advanced packaging lithography, process control metrology, and data analysis systems and software used by semiconductor device manufacturers worldwide. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down the costs and time to market of their products. The Company's expanding portfolio of equipment and software solutions is used in both the wafer processing and final manufacturing of ICs, and in adjacent markets such as FPD, LED and Solar. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the Company's website at