The RSH Series is compatible with wet and harsh media due to its MEMS-die-on-pressure-port design. This design isolates the media to the backside of the MEMS silicon die and inside of the Kovar or ceramic pressure port. The RSH Series is a great pressure sensor for broad temperature and pressure ranges. Better yet, it is available at a lower cost than fully compensated pressure-sensor packages, making it ideal for customers who know how or prefer to do their own compensation.
application-by-application basis with Merit Sensor’s engineering team)
What is media?
Media is the environment to which the sensor is exposed. It is typically some form of air, liquid, or gas. Some media can damage a sensor and/or its electronics.
What is backside pressure?
The backside of the MEMS silicon die is the side that has had a cavity etched into it to create the die’s thin sensing diaphragm. The pressure reaches the backside of the die through the sensor package’s pressure port.
What is the difference between absolute and gauge configurations?
With an absolute configuration, i.e. an absolute pressure sensor, the MEMS die has been configured with a sealed cavity on the side opposite the pressure side. With a gauge (also spelled gage) configuration, however, no sealed cavity exists. Therefore, one side of the MEMS die is exposed to the incoming pressure (e.g., from a liquid), and the other side of the MEMS die is exposed to ambient pressure.