Merit Sensor Systems, Inc. has partnered with customers for more than 20 years to design, fabricate, assemble and package reliable, cost-effective piezoresistive pressure sensor solutions for automotive, medical, industrial, aviation, defense and consumer applications.
Merit Sensor offers full-service design capabilities, in-house wafer fabrication, flexible shipping, packaging and assembly, piezoresistive technology (PRT), expansive pressure ranges (0.15 psi to 15,000 psi), complete pressure measurement (absolute, gage, differential and vacuum) and unmatched operating temperature range (-40°C to 150°C) via our Sentium® process. Additionally, Merit Sensor is able to provide unparalleled flexibility to customize pressure sensing solutions to fit into our customers’ applications.
Unlike other pressure sensor suppliers, Merit Sensor can provide customers with completely customized pressure sensor designs with large or smaller/limited production runs. Our customers range from pressure sensor transducer manufacturers who are already experts in pressure sensing technology and rely on Merit Sensor for highly stable and sensitive MEMS sensing elements (bare die), to customers who have little to no experience in the pressure sensing world and look to Merit Sensor to assist with a completely custom design and implementation of a pressure sensor that best fits their application.
At Merit Sensor our engineers are application experts. We are ready to help customers design your application to work with a pressure sensor, and/or design a customized pressure sensing solution that works for your application. If you are unsure whether a pressure sensor is right for your application, Merit Sensor can help you make that determination.
|Electrical & Environmental|
|Excitation||5||15||V||Maximum: 3 mA|
|Impedance||4000||5000||6000||Ω||Optional: 3,500 +/- 500|
|Operating Temperature||-40||150||°C||Sentium® technology|
|Offset||-10||0||10||mV/V||Zero pressure; gage only; @@25°C|
|Non-linearity||-0.15||0||0.15||% FSO||Best Fit Straight Line; @@25°C|
|Pressure Hysteresis||-0.05||0||0.05||% FSO||@@25°C|
|Temp Coeff – Zero||-25||0||25||µV/V/°C||-40°C to 150°C|
|Temp Coeff – Resistance||2300||2800||3300||PPM/°C||-40°C to 150°C|
|Temp Coeff – Sensitivity||-1500||-2200||-2500||PPM/°C||-40°C to 150°C|
|Thermal Hysteresis||-0.1||0||0.1||% FSO||Zero pressure|
|Long-Term Stability||-0.1||0||0.1||% FSO|
|Burst Pressure||3X||Full scale pressure|
|Burst Pressure (backside gage)||1500||psi|
|Full-Scale Output (@@ 5 volts) Other outputs available upon request|
|100 psi (6.9 bar; 689 KPa)||125||150||175||mV|
|300 psi (20.7 bar; 2,068 KPa)||120||150||180||mV|
|500 psi (34.5 bar 3,447 KPa)||150||175||200||mV|
|1000 psi (68.9 bar 6,895 KPa)||125||150||175||mV|
Part Number Configurator
Standard Part Numbers
Dimensions (millimeters, post-cut)
What types of pressure sensors does Merit Sensor offer? Show Answer
Merit Sensor sells MEMS Piezoresistive Pressure Sensors.
What is a Piezoresistive MEMS pressure sensor and how does it work? Show Answer
Piezoresistive literally means electromechanical. Pressure exerted on the sensor causes a mechanical deflection of the silicon diaphragm. In turn, this mechanical deflection (essentially the deformation of the crystal lattice structure of silicon) causes a change to the electrical properties or output of the implanted resistors.
What are the various pressure types? Show Answer
Gage: pressure relative to atmospheric or ambient pressure
Absolute: pressure relative to a perfect vacuum or sealed reference — zero pressure
Differential: pressure exerted on both side of the diaphragm — the difference between two pressures
Vacuum: negative pressure or pressure applied in reverse