Whether you need to measure fuel vapor at low pressures or refrigerant gas at higher pressures, you can rely on the TVC Series. It was designed to provide a stable output, even at temperatures up to 150 °C. One of two possible MEMS silicon dies, the HM Series or J Series, is mounted at the top of the ceramic pressure port, allowing backside pressure. This configuration isolates the media to the ceramic, silicon, and die-bond material. Another advantage of the die bond on top of the ceramic pressure port is the option of customization based on the two different MEMS dies.
Features
Pressure Range
1 to 300 psi / 69 mbar to 21 bar / 6.9 to 2,068 kPa
Temperature Range
-40 to 150 °C
Pressure Type
Absolute or gauge/gage
Media
Air, gases and liquids
Shipping
Bulk or tape and reel
Flexibility
Sensitivity, resistance, bridge, constraint, etc.
Typical Applications
Industrial
HVAC
Industrial Automation
Refrigeration
Automotive
Transmission Pressure
Oil Pressure
Fuel Rail
EGR/Exhaust
Crankcase
Related Images & Information
FAQ
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What is media? Show Answer
Media is the environment to which the sensor is exposed, such as liquid, gas, and air. Harsh media is anything, such as fuel, oil, exhaust, and water, that could damage the pressure-sensor package and/or its electronics.
What is backside pressure? Show Answer
Backside pressure is when the media is exposed to the etched-cavity side of the MEMS silicon die.
Why is a stable output important? Show Answer
A stable output assures you that your pressure sensor will be within the specified accuracy across the entire temperature range of the sensor and throughout the life of the application.
Merit Sensor is a subsidiary of Merit Medical Systems
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