Products

For more than 30 years we have been supplying customers from various industries with MEMS piezoresistive pressure sensors. We produce our own MEMS silicon dies in our wafer fab at our USA headquarters. At this same location we also produce various pressure-sensor packages. In addition to various MEMS silicon dies and pressure-sensor packages, we offer evaluation kits and a medical pressure transducer.

Have a look below at what we offer, and contact us with any questions.

MEMS Silicon Dies

We offer MEMS silicon dies in various sizes and sensitivities as well as different pressure types, such as absolute and gauge/gage.

L Series – Ultra-Low Pressure

PSI0.15 – 1
mbar10.3 – 68.9
KPa1 – 6.9
Size3.3 x 3.3 mm

7000 Series – Broad Pressure

PSI15 – 10,000
Bar1 – 689
KPa103 – 68,948
Size2.2 x 1.6 mm

HM Series – Harsh Media

HM Series MEMS Silicon Die
PSI15 – 500
Bar1 – 34.5
KPa103 – 3,447
Size2.08 x 2.08 mm

J Series – Low Pressure

J Series MEMS Silicon Die Thumbnail Image
PSI1 – 500
Bar0.07 – 34.5
KPa6.9 – 3,447
Size1.95 x 1.95 mm

S Series – Accuracy & Stability

PSI5 – 300
Bar0.34 – 21
KPa34.5 – 2,068
Size1.5 x 1.5 mm

Fully Compensated Packages

We offer pressure-sensor packages that are fully compensated over temperature, as broad as -40 to 150 °C, with an on-board ASIC.

TVC Series – Harsh Media

TVC Series fully compensated pressure sensor
PSI1 – 300
Bar0.07 – 21
KPa6.9 – 2,068
Size10.4 x 13.8 mm
Temp-40 – 150 °C

TR Series – Harsh Media

TR Series standard face seal
PSI15 – 500
Bar1 – 34.5
KPa103 – 3,447
Size10.16 x 12.7 mm
Temp-40 – 150 °C

LP Series – Ultra-Low Pressure

PSI0.04 – 15
mbar2.76 – 1,034
KPa0.28 – 103
inH2O1 – 416
Size10.2 x 13.3 mm
Temp-40 – 85 °C

LP2 Series – Highly Compact

PSI0.02 – 1
mbar1.5 – 70
KPa0.15 – 7
inH2O0.6 – 28
Temp-40 – 85 °C

HTS Series – Analog & Digital

HTS Series pressure sensor
PSI1 – 100
bar0.07 – 6.9
KPa6.89 – 689.5
Size10.5 x 13.2 mm
Temp-40 – 125 °C

CMS Series – Compact Analog & Digital

HTS Series pressure sensor
PSI2 – 150
bar0.14 – 10.34
KPa13.79 – 1,034.21
Size6.8 x 6.8 mm
Temp-40 – 85 °C

TRVF Series – Harsh Media

PSI1 – 300
Bar0.07 – 21
KPa6.9 – 2,068
Size10.32 x 12.85 mm
Temp-40 – 150 °C

Passively Compensated Packages

We also offer pressure sensors that are compensated for room temperatures by laser trimming thick-film resistors, which is what we call passive compensation.

BP Series – Blood Pressure

mmHg-500 to 1000
PSI-0.58 – 5.8
mbar40 – 400
KPa4 – 40
Size10.5 x 8.1 mm
Temp15 – 40 °C

BP+T Series – Blood Pressure + Temperature

mmHg-500 to 1000
PSI-9.7 – 19.3
mbar-668 – 1,333
KPa-67 – 133
Temp15 – 40 °C
Temp Accuracy+/- 0.5 °C

AP Series – Medical

PSI0 – 1000
bar0 – 70
KPa0 – 6,895
Size12.45 x 14.73 mm
Temp10 – 40 °C

Uncompensated Packages

In addition to compensated packages we offer uncompensated packages. In an uncompensated pressure-sensor package the MEMS silicon die has simply been wire bonded and packaged for protection and ease of integration into the customer’s housing.

LP Series – Ultra-Low Pressure

PSI0.15 – 30
mbar10.3 – 2,100
kPa1.03 – 207
Size10.2 x 13.3 mm
Temp-40 – 85 °C

RPD Series – Polycarbonate Port

PSI0 – 500
Bar0 – 34.5
KPa0 – 3,447
Size8.9 x 7.6 mm
Temp-40 – 85 °C

MS Series – Surface Mountable

MS Series gel filled
PSI5 – 500
Bar0.34 – 34.5
KPa34.5 – 3,447
Size6.4 x 6.4 mm
Temp-40 – 85 °C

SMD Series – Surface Mountable

PSI5 – 500
Bar0.34 – 34.5
KPa34.5 – 3,447
Size7.6 x 7.6 mm
Temp-40 – 85 °C

RS Series – Surface Mountable

RS Series Reflow Solder Surface Mount Pressure Sensor
PSI0 – 500
Bar0 – 34.5
KPa0 – 3,447
Size9.0 x 7.7 mm
Temp-40 – 85 °C

RSH Series – Harsh Media

RSH Series Pressure Sensor with a Ceramic Pressure Port
PSI0 – 500
Bar0 – 34.5
KPa0 – 3,447
Size9.0 x 7.7 mm
Temp-40 – 150 °C

PMD Series – Thru-Hole Mountable

PMDlrg
PSI5 – 60
Bar0.34 – 4.1
KPa34.5 – 414
Size6.4 x 6.4 mm
Temp-40 – 125 °C

Medical Pressure Transducer

We offer a complete pressure transducer, which is ready for a simple electrical connection via Molex connector and pressure connection via Luer fitting.

MSS100 – Pressure Transducer

MSS100 Pressure Transducer
PSI5 – 100
mmHg250 – 1000
KPa34.5 – 689.5
Temp10 – 50 °C

Evaluation Kits

We offer evaluation kits for the following pressure sensors: TR Series, LP Series, LP2 Series, CMS Series, and HTS Series.

Why Choose Merit Sensor as Your Pressure-Sensor Supplier?

Designed & Manufactured in the USA

In-House Wafer Fab & Production

Worldwide Distribution & Direct Sales

History of Customized Solutions