The RSH Series is compatible with wet and harsh media due to its MEMS-die-on-pressure-port design. This design isolates the media to the backside of the MEMS silicon die and inside of the Kovar or ceramic pressure port. The RSH Series is a great pressure sensor for broad temperature and pressure ranges. Better yet, it is available at a lower cost than fully compensated pressure-sensor packages, making it ideal for customers who know how or prefer to do their own compensation.
Features
Pressure Range
0 to 500 psi / 0 to 34.5 bar / 0 to 3,447 kPa
Temperature Range
-40 to 150 °C
Pressure Type
Absolute or gauge (backside pressure for both)
Media
Air, gases, and liquids (to be determined on an
application-by-application basis with Merit Sensor’s engineering team)
application-by-application basis with Merit Sensor’s engineering team)
Shipping
Tape and reel
Flexibility
Range of pressure, size of pressure port, and pressure type
Application Examples
Industrial
Process control, water pressure, and flow management
Medical
Inflation
Related Images & Information
FAQ
What is media?Show Answer
Media is the environment to which the sensor is exposed. It is typically some form of air, liquid, or gas. Some media can damage a sensor and/or its electronics.
What is backside pressure?Show Answer
The backside of the MEMS silicon die is the side that has had a cavity etched into it to create the die’s thin sensing diaphragm. The pressure reaches the backside of the die through the sensor package’s pressure port.
What is the difference between absolute and gauge configurations?Show Answer
With an absolute configuration, i.e. an absolute pressure sensor, the MEMS die has been configured with a sealed cavity on the side opposite the pressure side. With a gauge (also spelled gage) configuration, however, no sealed cavity exists. Therefore, one side of the MEMS die is exposed to the incoming pressure (e.g., from a liquid), and the other side of the MEMS die is exposed to ambient pressure.
Merit Sensor is a subsidiary of Merit Medical Systems
