Whether you need to measure fuel vapor at low pressures or refrigerant gas at higher pressures, you can rely on the TVC Series. It was designed to provide a stable output, even at temperatures up to 150 °C. One of two possible MEMS silicon dies, the HM Series or J Series, is mounted at the top of the ceramic pressure port, allowing backside pressure. This configuration isolates the media to the ceramic, silicon, and die-bond material. Another advantage of the die bond on top of the ceramic pressure port is the option of customization based on the two different MEMS dies.
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What is media?
Media is the environment to which the sensor is exposed, such as liquid, gas, and air. Harsh media is anything, such as fuel, oil, exhaust, and water, that could damage the pressure-sensor package and/or its electronics.
What is backside pressure?
Backside pressure is when the media is exposed to the etched-cavity side of the MEMS silicon die.
Why is a stable output important?
A stable output assures you that your pressure sensor will be within the specified accuracy across the entire temperature range of the sensor and throughout the life of the application.